Formation and behavior of negative ions in low pressure aniline-containing RF plasmas

Formation and behavior of negative ions in low pressure aniline-containing RF plasmas

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PDF) Effect of negative oxygen ions on the characteristics of

Formation and behavior of negative ions in low pressure aniline-containing RF plasmas

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The Radial Distribution of Ions and Electrons in RF Inductively

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a) Decay time of the H + 3 ion flux measured with the plasma monitor

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Glow discharge voltage versus pressure of Ar and Ar/O 2 in the tube